[Exhaust speed] 50/60 L/min (50/60Hz)
[Ultimate pressure] ≦20/≦15 Pa (50/60Hz)
No oil required, ``low vibration'' and ``low noise.'' We have a proven track record in various fields and applications.
For accelerators, synchrotron radiation facilities, various analysis devices, gas recovery, etc.

Features

- Can handle a wide range of pressures, from atmospheric pressure to ultimate pressure.
・“Proven track record” is proven by ANEST IWATA
　From accelerators to the general-purpose vacuum market, dry scroll vacuum pumps are used in a variety of vacuum environments.
　There is no back diffusion of lubricating oil and a clean vacuum can be obtained.
　It is resistant to repeated cycles of atmosphere and vacuum, and can be operated continuously near the atmosphere.
・High efficiency with low vibration and noise! This is
　a mechanism in which the scroll intake, compression, and exhaust strokes are continuous and there is little torque fluctuation, resulting in low vibration and low noise.
　Because the suction and exhaust chambers are not adjacent to each other, there is less leakage and high efficiency.
・Easy maintenance
　Since no cooling water or lubricating oil is used, installation and maintenance are easy.
　There is no need to inspect or replace oil filters, lubricating oil, etc.

Use applications

Sputtering equipment, vapor deposition equipment, ion plating equipment, accelerator
surface modification equipment, electron beam processing, vacuum melting furnaces, vacuum heat treatment furnaces, gas circulation and recovery equipment
for physical and chemical experiments, analytical instruments, various exhaust equipment, vacuum packaging machines, He leak detector, vacuum suction conveyance, etc.

Safety precautions

This vacuum pump has clean exhaust specifications.
Do not pour gases that are toxic to the human body, explosive or flammable gases, corrosive gases, chemicals, solvents, powders, etc.
Please note that we cannot undertake maintenance for pumps that exhaust special gases, etc.
Please use within the ambient temperature range of 5°C to 40°C (10°C to 41°C for ISP-1000E).

specification