[Exhaust speed] 500/600 L/min (50/60Hz)
[Ultimate pressure] ≦1 Pa
No oil required, "low vibration" and "low noise". We have a proven track record in various fields and applications.
For accelerators, synchrotron radiation facilities, various analysis devices, gas recovery, etc.


 Features

- Can handle a wide range of pressures, from atmospheric pressure to ultimate pressure.
 Of course, since it is multi-voltage, it can be used with power sources all over the world.
・“Proven track record” is proven by ANEST IWATA
 From accelerators to the general-purpose vacuum market, dry scroll vacuum pumps are used in a variety of vacuum environments.
 There is no back diffusion of lubricating oil and a clean vacuum can be obtained.
 It is resistant to repeated cycles of atmosphere and vacuum, and can be operated continuously near the atmosphere.
・High efficiency with low vibration and noise! This is
 a mechanism in which the scroll intake, compression, and exhaust strokes are continuous and there is little torque fluctuation, resulting in low vibration and low noise.
 Because the suction and exhaust chambers are not adjacent to each other, there is less leakage and high efficiency.
・Easy maintenance
 Since no cooling water or lubricating oil is used, installation and maintenance are easy.
 There is no need to inspect or replace oil filters, lubricating oil, etc.


Use applications

Sputtering equipment, vapor deposition equipment, ion plating equipment, accelerator
surface modification equipment, electron beam processing, vacuum melting furnaces, vacuum heat treatment furnaces, gas circulation and recovery equipment
for physical and chemical experiments, analytical instruments, various exhaust equipment, vacuum packaging machines, He leak detector, vacuum suction conveyance, etc.


specification

formatDesign pumping speed 50Hz [L/min]Design pumping speed 60Hz [L/min]Ultimate pressure 50Hz [Pa]Ultimate pressure 60Hz [Pa]Leak amount [Pa・㎥/s]Water vapor consumption during air flush [g/day]Air flush amount [L/min]Intake diameterExhaust diametercooling method[Electric motor] Output 50Hz [kW][Electric motor] Output 60Hz[kW][Electric motor] phase[Electric motor] 100V rated current 50Hz [A][Electric motor] 100V rated current 60Hz [A][Electric motor] 200V rated current 50Hz [A][Electric motor] 200V rated current 60Hz [A][Others] Operating ambient temperature [℃][Others] Approximate mass [kg][Others] External dimensions Overall width W [mm] x Depth L [mm] x Overall height H [mm][Others] RoHS compliant[Others] Hour meter[Others] Air flash
ISP-500C-SH 500 600 ≦1 ≦1 ≦1.0×10-5 twenty five Ten NW40 NW25 air cooling 0.6 0.6 Single-phase 8.5 Ten 4.3 4.8 5~40 44 328×444×370 Yes Yes Yes
ISP-500C-SV 500 600 ≦1 ≦1 ≦1.0×10-5 twenty five Ten NW40 NW25 air cooling 0.6 0.6 Single-phase 8.5 Ten 4.3 4.8 5~40 44 290×444×396 Yes Yes Yes
ISP-500C-TH 500 600 ≦1 ≦1 ≦1.0×10-5 twenty five Ten NW40 NW25 air cooling 0.6 0.6 Three-phase -- -- 2.7 2.8 5~40 38 328×374×370 Yes Yes Yes
ISP-500C-TV 500 600 ≦1 ≦1 ≦1.0×10-5 twenty five Ten NW40 NW25 air cooling 0.6 0.6 Three-phase -- -- 2.7 2.8 5~40 38 292×374×396 Yes Yes Yes