[Exhaust speed] 315/380 L/min (50/60Hz)
[Ultimate pressure] ≦3 Pa
The motor is different from the ISP series, achieving "low noise", "low vibration", and "extended maintenance cycle".
Lineup only for 320L/min class.

Features

・Lower vibration and noise!
　The low-vibration, low-noise oil-free scroll vacuum pump (ISP series) has become even more "low-vibration" and "low-noise."
　Minimizes the impact on analytical equipment.
・Extended maintenance period
　In addition, the maintenance period is extended, reducing running costs. (The maintenance period varies depending on the usage conditions.)
- Inferior to the ISP series:
　Because the motor rotation speed is lowered, the pumping speed is lower.

Use applications

Synchrotron radiation facilities, accelerators, analytical equipment, experimental equipment, scanning electron microscopes, etc.

Safety precautions

This vacuum pump has clean exhaust specifications.
Do not pour gases that are toxic to the human body, explosive or flammable gases, corrosive gases, chemicals, solvents, powders, etc.
Please note that we cannot undertake maintenance for pumps that exhaust special gases, etc.
Please use at an ambient temperature of 5℃ to 40℃.

specification