High vacuum pumping system combined with a turbo molecular pump. A large model that can be customized to suit your needs.

Features

・Clean exhaust
　A complete oil-free high vacuum exhaust system due to the combination of an oil-free scroll vacuum pump and a turbo molecular pump.
- Compact
　Since it is extremely compact and requires little installation space, it can be installed close to the equipment you are currently using.
・Easy to operate:
　Manual operation allows you to operate the scroll vacuum pump and turbomolecular pump individually, and automatic operation* allows you to start them simultaneously with a single button.
　You can choose according to your usage.
　*When performing automatic operation, there is a limit to the capacity including the chamber and piping parts.

Use applications

Accelerators, X-ray spectrometers, synchrotron radiation, electron microscopes, leak test
various testing and analysis devices, mass spectrometers, auxiliary high vacuum evacuation devices, surface analysis devices, etc.

specification