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High vacuum evacuation unit combined with a turbo molecular pump. Compact high vacuum exhaust unit.
Features
・Clean exhaust
This is a complete oil-free high vacuum exhaust unit due to the combination of an oil-free scroll vacuum pump and a turbo molecular pump.
- Compact
Since it is extremely compact and requires little installation space, it can be installed close to the equipment you are currently using.
- Operability
This unit can be operated automatically* by starting the scroll vacuum pump and turbo molecular pump at the same time with a single button.
*When performing automatic operation, there is a limit to the capacity including the chamber and piping parts.
Use applications
Accelerators, X-ray spectrometers, synchrotron radiation, electron microscopes, leak tests, various testing and analysis equipment
, mass spectrometers, auxiliary high vacuum pumping equipment, surface analysis equipment, etc.
specification
| format | [Turbo molecular pump unit] Unit ultimate pressure 50Hz [Pa] | [Turbo molecular pump unit] Unit ultimate pressure 60Hz [Pa] | [Turbo molecular pump unit] Unit suctionable fluid | [Turbo molecular pump unit] Unit intake port diameter | [Turbo molecular pump unit] Unit exhaust port diameter | [Turbo molecular pump unit] Unit cooling method | [Turbo molecular pump unit] Turbo molecular pump manufacturer | [Turbo molecular pump unit] Turbo molecular pump type | [Turbo molecular pump unit] Turbo molecular pump pumping speed N2 [L/s] | [Turbo molecular pump unit] Turbo molecular pump pumping speed H2 [L/s] | [Turbo molecular pump unit] Turbo molecular pump pumping speed Ar [L/s] | [Turbo molecular pump unit] Turbo molecular pump pumping speed He [L/s] | [Turbo molecular pump unit] Rough pump manufacturer | [Turbo molecular pump unit] Coarse pump type | [Turbo molecular pump unit] Number of coarse pumps installed | [Turbo molecular pump unit] Rough pump maximum suction pressure | [Electric motor] phase | [Others] RoHS compliant | [Others] Valve | [Others] Vent valve | [Others] Speed controller | [Others] Operating ambient temperature [℃] | [Others] External dimensions Overall width W [mm] x Depth L [mm] x Overall height H [mm] |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| VTU-080-LH | 10-5 units | 10-5 units | atmosphere | CF63 | NW16 | air cooling | leibold | SL-80 | 70 | 45 | 65 | 50 | Anest Iwata | ISP-90 | 1 | Atmospheric pressure | Single-phase | Nothing | Vacuum pilot valve XLJ-25-1G-X1453 (SMC Corporation) | Plug valve B-4P4T4-RT (Japan Swagelok FST Corporation) | Speed controller SC3R-8-I (CKD Corporation) | 15~40 | 436×235×475 |
| VTU-080-LHA1 | 10-5 units | 10-5 units | -- | -- | -- | -- | leibold | SL-80 | 70 | 45 | 65 | 50 | Anest Iwata | ISP-90 | 1 | -- | Single-phase | Nothing | Vacuum pilot valve XLJ-25-1G-X1453 (SMC Corporation) | Plug valve B-4P4T4-RT (Japan Swagelok FST Corporation) | Speed controller SC3R-8-I (CKD Corporation) | 15~40 | 436×235×475 |
| VTU-080-LHA2 | 10-5 units | 10-5 units | -- | -- | -- | -- | leibold | SL-80 | 70 | 45 | 65 | 50 | Anest Iwata | ISP-90 | 1 | -- | Single-phase | Nothing | Vacuum pilot valve XLJ-25-1G-X1453 (SMC Corporation) | Plug valve B-4P4T4-RT (Japan Swagelok FST Corporation) | Speed controller SC3R-8-I (CKD Corporation) | 15~40 | 436×235×475 |
