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High vacuum evacuation unit combined with a turbo molecular pump. Compact high vacuum exhaust unit.
Features
・Clean exhaust
This is a complete oil-free high vacuum exhaust unit due to the combination of an oil-free scroll vacuum pump and a turbo molecular pump.
- Compact
Since it is extremely compact and requires little installation space, it can be installed close to the equipment you are currently using.
- Operability
This unit can be operated automatically* by starting the scroll vacuum pump and turbo molecular pump at the same time with a single button.
*When performing automatic operation, there is a limit to the capacity including the chamber and piping parts.
Use applications
Accelerators, X-ray spectrometers, synchrotron radiation, electron microscopes, leak tests, various testing and analysis equipment
, mass spectrometers, auxiliary high vacuum pumping equipment, surface analysis equipment, etc.
Safety precautions
This vacuum pump has clean exhaust specifications.
Do not pour gases that are harmful to the human body, explosive or flammable gases, corrosive gases, chemicals, solvents, powders, etc.
Please note that we cannot undertake maintenance for pumps that exhaust special gases, etc.
Please use within the ambient temperature range of 15°C to 30°C.
specification
| format | [Turbo molecular pump unit] Unit ultimate pressure 50Hz [Pa] | [Turbo molecular pump unit] Unit ultimate pressure 60Hz [Pa] | [Turbo molecular pump unit] Turbo molecular pump manufacturer | [Turbo molecular pump unit] Turbo molecular pump type | [Turbo molecular pump unit] Turbo molecular pump pumping speed N2 [L/s] | [Turbo molecular pump unit] Turbo molecular pump pumping speed H2 [L/s] | [Turbo molecular pump unit] Turbo molecular pump pumping speed Ar [L/s] | [Turbo molecular pump unit] Turbo molecular pump pumping speed He [L/s] | [Turbo molecular pump unit] Rough pump manufacturer | [Turbo molecular pump unit] Coarse pump type | [Turbo molecular pump unit] Number of coarse pumps installed | [Electric motor] phase | [Others] RoHS compliant | [Others] Valve | [Others] Vent valve | [Others] Speed controller | [Others] Operating ambient temperature [℃] | [Others] External dimensions Overall width W [mm] x Depth L [mm] x Overall height H [mm] |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| VTU-080-LM1 | 10-5 units | 10-5 units | leibold | SL-80 | 70 | 45 | 65 | 50 | Anest Iwata | ISP-50-SV1 | 1 | Single-phase | Nothing | -- | Plug valve B-4P4T4-RT (Japan Swagelok FST Corporation) | Speed controller SC3R-8-I (CKD Corporation) | 15~40 | 436×235×475 |
| VTU-080-LM2 | 10-5 units | 10-5 units | leibold | SL-80 | 70 | 45 | 65 | 50 | Anest Iwata | ISP-50-SV2 | 1 | Single-phase | Nothing | -- | Plug valve B-4P4T4-RT (Japan Swagelok FST Corporation) | Speed controller SC3R-8-I (CKD Corporation) | 15~40 | 436×235×475 |
| VTU-080-LMA1 | 10-5 units | 10-5 units | leibold | SL-80 | 70 | 45 | 65 | 50 | Anest Iwata | ISP-50-SV1 | 1 | Single-phase | Nothing | Vacuum pilot valve XLJ-25-1G-X1453 (SMC Corporation) | Plug valve B-4P4T4-RT (Japan Swagelok FST Corporation) | Speed controller SC3R-8-I (CKD Corporation) | 15~40 | 436×235×475 |
| VTU-080-LMA2 | 10-5 units | 10-5 units | leibold | SL-80 | 70 | 45 | 65 | 50 | Anest Iwata | ISP-50-SV2 | 1 | Single-phase | Nothing | Vacuum pilot valve XLJ-25-1G-X1453 (SMC Corporation) | Plug valve B-4P4T4-RT (Japan Swagelok FST Corporation) | Speed controller SC3R-8-I (CKD Corporation) | 15~40 | 436×235×475 |
