High vacuum pumping system combined with a turbo molecular pump. A large model that can be customized to suit your needs.

Features

・Clean exhaust
　A complete oil-free high vacuum exhaust system due to the combination of an oil-free scroll vacuum pump and a turbo molecular pump.
- Compact
　Since it is extremely compact and requires little installation space, it can be installed close to the equipment you are currently using.
・Easy to operate:
　Manual operation allows you to operate the scroll vacuum pump and turbomolecular pump individually, and automatic operation* allows you to start them simultaneously with a single button.
　You can choose according to your usage.
　*When performing automatic operation, there is a limit to the capacity including the chamber and piping parts.

Use applications

Accelerators, X-ray spectrometers, synchrotron radiation, electron microscopes, leak test
various testing and analysis devices, mass spectrometers, auxiliary high vacuum evacuation devices, surface analysis devices, etc.

Safety precautions

This vacuum pump has clean exhaust specifications.
Do not pour gases that are harmful to the human body, explosive or flammable gases, corrosive gases, chemicals, solvents, powders, etc.
Please note that we cannot undertake maintenance for pumps that exhaust special gases, etc.
Please use within the ambient temperature range of 15°C to 30°C.
Chambers, vacuum gauges, automatic valves, etc. can be installed as desired.

specification