Dry vacuum pump

[Exhaust speed] 50/60 L/min (50/60Hz)
[Ultimate pressure] ≦20/≦15 Pa (50/60Hz)
No oil required, ``low vibration'' and ``low noise.'' We have a proven track record in various fields and applications.
For accelerators, synchrotron radiation facilities, various analysis devices, gas recovery, etc.

[Exhaust speed] 90/108 L/min (50/60Hz)
[Ultimate pressure] ≦5 Pa
No oil required, "low vibration" and "low noise". We have a proven track record in various fields and applications.
For accelerators, synchrotron radiation facilities, various analysis devices, gas recovery, etc.

[Exhaust speed] 250/300 L/min (50/60Hz)
[Ultimate pressure] ≦1.6 Pa
No oil required, "low vibration" and "low noise". We have a proven track record in various fields and applications around the world.
For accelerators, synchrotron radiation facilities, various analysis devices, gas recovery, etc.

 [Pumping speed] 250/300 L/min (50/60Hz)
[Ultimate pressure] ≦1.6 Pa
Leak performance improved by two orders of magnitude compared to C type.
No oil required, low vibration and low noise. We have a proven track record in various fields and applications.
For accelerators, synchrotron radiation facilities, various analysis devices, gas recovery, etc.

[Exhaust speed] 500/600 L/min (50/60Hz)
[Ultimate pressure] ≦1 Pa
No oil required, "low vibration" and "low noise". We have a proven track record in various fields and applications.
For accelerators, synchrotron radiation facilities, various analysis devices, gas recovery, etc.

[Pumping speed] 500/600 L/min (50/60Hz)
[Ultimate pressure] ≦1 Pa
Leaktight specification that provides a highly accurate vacuum environment.
No oil required, low vibration and low noise. We have a proven track record in various fields and applications. For accelerators, synchrotron radiation facilities, various analysis devices, gas recovery, etc.

[Exhaust speed] 1000/1200 L/min (50/60Hz)
[Ultimate pressure] ≦1 Pa
No oil required, "low vibration" and "low noise". We have a proven track record in various fields and applications.
For accelerators, synchrotron radiation facilities, various analysis devices, gas recovery, etc.

[Exhaust speed] 315/380 L/min (50/60Hz)
[Ultimate pressure] ≦3 Pa
The motor is different from the ISP series, achieving "low noise", "low vibration", and "extended maintenance cycle".
Lineup only for 320L/min class.

[Pumping speed] 100/120 L/min (50/60Hz)
[Ultimate pressure] ≦50 Pa
A tough dry scroll vacuum pump that is resistant to water vapor exhaust.
For degassing, defoaming, vacuum drying, leakage inspection, etc.

[Pumping speed] 100/120 L/min (50/60Hz)
[Ultimate pressure] ≦50 Pa
Hard coat type with special treatment for excellent durability on the surface of the pump body. Resistant to water vapor exhaust, seal sliding surface lasts 3 times longer.
For pharmaceuticals, vacuum distillation, degassing and defoaming, purification equipment, etc.

[Pumping speed] 433/516 L/min (50/60Hz)
[Ultimate pressure] ≦30 Pa
[Backup material] Silicone rubber A
tough dry scroll vacuum pump that is resistant to water vapor exhaust.
For suction conveyance, degassing and defoaming, vacuum drying, leakage inspection, etc.

[Pumping speed] 433/516 L/min (50/60Hz)
[Ultimate pressure] ≦100 Pa
[Backup material] Fluororubber A tough
dry scroll vacuum pump that is resistant to water vapor exhaust.
For degassing, defoaming, vacuum drying, leakage inspection, etc.

[Pumping speed] 433/516 L/min (50/60Hz)
[Ultimate pressure] ≦100 Pa
Hard coat type with special treatment for excellent durability on the surface of the pump body. Resistant to water vapor exhaust, seal sliding surface lasts 3 times longer.
For pharmaceuticals, vacuum distillation, degassing and defoaming, purification equipment, etc.

[Pumping speed] 863/1024 L/min (50/60Hz)
[Ultimate pressure] ≦30 Pa
A package type of tough dry scroll vacuum pump with casters that is resistant to water vapor exhaust.
For degassing, defoaming, vacuum drying, leakage inspection, etc.

[Pumping speed] 208/255 L/min (50/60Hz)
[Ultimate pressure] ≦750 Pa
Bring the scroll vacuum pump closer to you. Model for low vacuum area.
For vacuum forming, suction conveyance, etc.

[Pumping speed] 432/512 L/min (50/60Hz)
[Ultimate pressure] ≦500 Pa
[Backup material] Silicone rubber
scroll vacuum pump at your fingertips. Model for low vacuum area.
For vacuum forming, suction conveyance, etc.

[Pumping speed] 432/512 L/min (50/60Hz)
[Ultimate pressure] ≦500 Pa
[Backup material] Bring the fluorine
scroll vacuum pump closer to you. Model for low vacuum area.
For vacuum forming, suction conveyance, etc.

[Pumping speed] 860/1031 L/min (50/60Hz)
[Ultimate pressure] ≦500 Pa
Bring the scroll vacuum pump closer to you. Model for low vacuum area. For vacuum formation, suction conveyance, etc.